Excimer UV Contract Testing
Possible experimental size: 600×700mm (maximum) Lamp illuminance: 50–140mW Contract processing testing available Demo unit available for loan
【Experimental Equipment Specifications】 - Usable size: 600×700mm (maximum) - Lamp illuminance: 50–140mW - Number of lamps: 5 - Stage transport speed: 0.5–5.8m/min - Atmosphere utilities: N2, CDA, ambient air - Clean room: Class 10,000 - Measurable with a contact angle meter 【Features】 - High illuminance and high uniformity due to high-intensity RF discharge method - Direct irradiation from the lamp tube surface without electrodes or quartz windows on the irradiation surface - Excimer lamps can be lit even in a vacuum environment - Significant reduction in nitrogen usage due to unique slit holder - Adjustable illuminance for each lamp - Effective lamp length: up to MAX G10 size 【Electrode-less Irradiation Unit & N2 Slit Holder Structure】 The lamp structure does not have electrodes on the irradiation surface, resulting in no obstruction of light and minimal transmission or reflection losses, leading to high efficiency. Nitrogen (CDA) is ejected along the lamp tube wall from individual lamp holders. This efficiently generates ozone and allows for uniform control of oxygen concentration with a small amount. 【Main Applications】 - Surface modification cleaning of glass and films - Bonding of films, glass, resins, metals, etc. - HDD cleaning, modification, and lubricant curing - Resist removal and ashing
- Company：ブルーオーシャンテクノロジー
- Price：Other
